ST

Shigeo Tanuma

National Institute for Materials Science 0000-0003-2628-9941

214

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11,063

Citations

33

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66

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Shigeo Tanuma (214)
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Electron and X-Ray Spectroscopy Techniques (174)
X-ray Spectroscopy and Fluorescence Analysis (82)
Surface and Thin Film Phenomena (49)
Semiconductor materials and devices (38)
Advancements in Photolithography Techniques (30)