LR
Visit Website →Lam Research
American company
738
Papers
21,914
Citations
69
h-index
379
i10-index
4.39
2yr Impact
Loading papers...
Search by keywords
Filter by Type
- Article (667)
- Preprint (13)
- Review (12)
- Paratext (9)
- Dissertation (8)
Filter by Open Access Type
- Open Access (244)
- Closed Access (478)
Filter by Authors
- David B. Graves (34)
- Sumit Agarwal (23)
- Eric A. Hudson (23)
- Steven M. George (22)
- Dennis M. Hausmann (20)
Filter by Topics
- Semiconductor materials and devices (274)
- Plasma Diagnostics and Applications (175)
- Copper Interconnects and Reliability (99)
- Metal and Thin Film Mechanics (82)
- Advancements in Semiconductor Devices and Circuit Design (65)