Optical waveguides in crystalline dielectric materials produced by femtosecond‐laser micromachining
Shandong University · Ministry of Education · +2 more institutions
Abstract
Abstract Femtosecond‐laser micromachining (also known as inscription or writing) has been developed as one of the most efficient techniques for direct three‐dimensional microfabrication of transparent optical materials. In integrated photonics, by using direct writing of femtosecond/ultrafast laser pulses, optical waveguides can be produced in a wide variety of optical materials. With diverse parameters, the formed waveguides may possess different configurations. This paper focuses on crystalline dielectric materials, and is a review of the state‐of‐the‐art in the fabrication, characterization and applications of femtosecond‐laser micromachined waveguiding structures in optical crystals and ceramics. A brief…
Citation impact
- FWCI
- 54.99
- Percentile
- 100%
- References
- 181
Authors
2Topics & keywords
- Femtosecond
- Materials science
- Surface micromachining
- Laser
- Microfabrication
- Optoelectronics
- Ultrashort pulse
- Photonics