bookJan 1, 2004Closed access
Silicon-on-Insulator Technology: Materials to VLSI
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Abstract
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Citation impact
1,501
total citations
- FWCI
- 58.72
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- 100%
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Authors
1Topics & keywords
Keywords
- Very-large-scale integration
- Silicon on insulator
- Silicon
- Materials science
- Insulator (electricity)
- Engineering physics
- Electronic circuit
- Optoelectronics
UN Sustainable Development Goals
- Industry, innovation and infrastructure
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