Abstract
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Citation impact
2,190
total citations
- FWCI
- 76.86
- Percentile
- 100%
- References
- 23
Citations per year
Authors
4Topics & keywords
Topics
Keywords
- Resonator
- Q factor
- Dielectric
- Wafer
- Optoelectronics
- Materials science
- Lithography
- Chip
UN Sustainable Development Goals
- Affordable and clean energy
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