A Graphene-Based Resistive Pressure Sensor with Record-High Sensitivity in a Wide Pressure Range
Institute of Microelectronics · Tsinghua University
Abstract
Pressure sensors are a key component in electronic skin (e-skin) sensing systems. Most reported resistive pressure sensors have a high sensitivity at low pressures (5 kPa), which is inadequate for practical applications. For example, actions like a gentle touch and object manipulation have pressures below 10 kPa, and 10-100 kPa, respectively. Maintaining a high sensitivity in a wide pressure range is in great demand. Here, a flexible, wide range and ultra-sensitive resistive pressure sensor with a foam-like structure based on laser-scribed graphene (LSG) is demonstrated. Benefitting from the large spacing between graphene layers and the unique v-shaped microstructure of the LSG, the sensitivity of the pressure…
Citation impact
- FWCI
- 31.27
- Percentile
- 100%
- References
- 21
Authors
10- HTHe TianCorresponding
Institute of Microelectronics, Tsinghua University
- YSYi Shu
Institute of Microelectronics, Tsinghua University
- XWXuefeng Wang
Institute of Microelectronics, Tsinghua University
- MMMohammad Mohammad
Institute of Microelectronics, Tsinghua University
- ZBZhi Bie
Institute of Microelectronics, Tsinghua University
Topics & keywords
- Resistive touchscreen
- Materials science
- Pressure sensor
- Graphene
- Sensitivity (control systems)
- Optoelectronics
- Pressure measurement
- Work (physics)
- Affordable and clean energy