Plasmonic Color Filters for CMOS Image Sensor Applications

We report on the optical properties of plasmonic hole arrays as they apply to requirements for plasmonic color filters designed for state-of-the-art Si CMOS image sensors. The hole arrays are composed of hexagonally packed subwavelength sized holes on a 150 nm Al film designed to operate at the primary colors of red, green, and blue. Hole array plasmonic filters show peak transmission in the 40-50% range for large (>5 × 5 μm(2)) size filters and maintain their filtering function for pixel sizes as small as ∼1 × 1 μm(2), albeit at a cost in transmission efficiency. Hole array filters are found to robust with respect to spatial crosstalk between pixel within our detection limit and preserve their filtering…