Interferometer-controlled scanning transmission X-ray microscopes at the Advanced Light Source

Two new soft X-ray scanning transmission microscopes located at the Advanced Light Source (ALS) have been designed, built and commissioned. Interferometer control implemented in both microscopes allows the precise measurement of the transverse position of the zone plate relative to the sample. Long-term positional stability and compensation for transverse displacement during translations of the zone plate have been achieved. The interferometer also provides low-distortion orthogonal x, y imaging. Two different control systems have been developed: a digital control system using standard VXI components at beamline 7.0, and a custom feedback system based on PC AT boards at beamline 5.3.2. Both microscopes are…

• NS
  National Science Foundation

  Award: 9975694
• UD
  U.S. Department of Energy

  Awards: FG02-98ER45737, DE-FG02-, DE-FG02-98ER45737, DE-FG02
• NC
  North Carolina State University
• NS
  Natural Sciences and Engineering Research Council of Canada
• DO
  Division of Materials Research