Oxide Materials for Development of Integrated Gas Sensors—A Comprehensive Review

ABSTRACT In the recent past a great deal of research efforts were directed toward the development of miniaturized gas-sensing devices, particularly for toxic gas detection and for pollution monitoring. Though various techniques are available for gas detection, solid state metal oxides offer a wide spectrum of materials and their sensitivities for different gaseous species, making it a better choice over other options. In this article a critical parameter analysis of different metal oxides that are known to be sensitive to various gaseous species are thoroughly examined. This includes phase of the oxide, sensing gaseous species, operating temperature range, and physical form of the material for the development…