reviewMaterials Science and Engineering R ReportsJan 1, 2005Closed access

Wet etching of GaN, AlN, and SiC: a review

DZDanping ZhuangJHJames H. Edgar

Kansas State University

Indexed incrossref

Abstract

No abstract available for this paper.

Citation impact

793
total citations
FWCI
18.17
Percentile
100%
References
221
Citations per year

Authors

2

Topics & keywords

Topics
Keywords
  • Etching (microfabrication)
  • Materials science
  • Reactive-ion etching
  • Isotropic etching
  • Dry etching
  • Fabrication
  • Optoelectronics
  • Nanotechnology
UN Sustainable Development Goals
  • Clean water and sanitation
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