articleThin Solid FilmsJan 9, 2005Closed access

Fundamental understanding and modeling of reactive sputtering processes

SBS. BergTNTomas Nyberg

Uppsala University

Indexed incrossref

Abstract

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Citation impact

695
total citations
FWCI
55.74
Percentile
100%
References
22
Citations per year

Authors

2

Topics & keywords

Topics
Keywords
  • Sputtering
  • Deposition (geology)
  • Stoichiometry
  • Process engineering
  • Process (computing)
  • Materials science
  • Process control
  • Characterization (materials science)
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