articleNature MaterialsJul 11, 2003Closed access

Fabrication of solid-state nanopores with single-nanometre precision

AJA. J. StormJHJ. H. ChenXLXinsheng LingHZH.W. ZandbergenCDCees Dekker

Delft University of Technology · Brown University

PubMed
Indexed incrossrefpubmed

Abstract

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1,348
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29.83
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100%
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Authors

5

Topics & keywords

Topics
Keywords
  • Nanopore
  • Materials science
  • Nanometre
  • Nanotechnology
  • Silicon
  • Silicon oxide
  • Fabrication
  • Electron-beam lithography
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