Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey
Shanghai Jiao Tong University · Concordia University · +1 more institution
Abstract
Piezo-actuated stages have become more and more promising in nanopositioning applications due to the excellent advantages of the fast response time, large mechanical force, and extremely fine resolution. Modeling and control are critical to achieve objectives for high-precision motion. However, piezo-actuated stages themselves suffer from the inherent drawbacks produced by the inherent creep and hysteresis nonlinearities and vibration caused by the lightly damped resonant dynamics, which make modeling and control of such systems challenging. To address these challenges, various techniques have been reported in the literature. This paper surveys and discusses the progresses of different modeling and control…
Citation impact
- FWCI
- 35.28
- Percentile
- 100%
- References
- 210
Authors
5Topics & keywords
- Vibration control
- Vibration
- Control engineering
- Actuator
- Hysteresis
- Engineering
- Control (management)
- Computer science