X-ray diffraction of III-nitrides
Indexed incrossref
Abstract
The III-nitrides include the semiconductors AlN, GaN and InN, which have band gaps spanning the entire UV and visible ranges. Thin films of III-nitrides are used to make UV, violet, blue and green light-emitting diodes and lasers, as well as solar cells, high-electron mobility transistors (HEMTs) and other devices. However, the film growth process gives rise to unusually high strain and high defect densities, which can affect the device performance. X-ray diffraction is a popular, non-destructive technique used to characterize films and device structures, allowing improvements in device efficiencies to be made. It provides information on crystalline lattice parameters (from which strain and composition are…
Citation impact
1,062
total citations
- FWCI
- 38.24
- Percentile
- 100%
- References
- 275
Citations per year
Authors
2Topics & keywords
Topics
Keywords
- Wurtzite crystal structure
- Optoelectronics
- Misorientation
- Nitride
- Diffraction
- Superlattice
- Lattice constant
- Crystallite
No related works found for this paper.