articleReports on Progress in PhysicsFeb 20, 2009Closed access

X-ray diffraction of III-nitrides

University of Cambridge

Indexed incrossref

Abstract

The III-nitrides include the semiconductors AlN, GaN and InN, which have band gaps spanning the entire UV and visible ranges. Thin films of III-nitrides are used to make UV, violet, blue and green light-emitting diodes and lasers, as well as solar cells, high-electron mobility transistors (HEMTs) and other devices. However, the film growth process gives rise to unusually high strain and high defect densities, which can affect the device performance. X-ray diffraction is a popular, non-destructive technique used to characterize films and device structures, allowing improvements in device efficiencies to be made. It provides information on crystalline lattice parameters (from which strain and composition are…

Citation impact

1,062
total citations
FWCI
38.24
Percentile
100%
References
275
Citations per year

Authors

2

Topics & keywords

Keywords
  • Wurtzite crystal structure
  • Optoelectronics
  • Misorientation
  • Nitride
  • Diffraction
  • Superlattice
  • Lattice constant
  • Crystallite
No related works found for this paper.

Funding