articleUltramicroscopyJul 18, 2006Closed access

In situ site-specific specimen preparation for atom probe tomography

KTKeith ThompsonDLD. LawrenceDLDJ LarsonJDJesse D. OlsonTFThomas F. Kelly

Group Image (Poland) · University of North Texas

PubMed
Indexed incrossrefpubmed

Abstract

No abstract available for this paper.

Citation impact

1,698
total citations
FWCI
18.46
Percentile
100%
References
22
Citations per year

Authors

6

Topics & keywords

Topics
Keywords
  • Wafer
  • Atom probe
  • Materials science
  • Focused ion beam
  • Ion beam
  • Atom (system on chip)
  • Ion
  • Beam (structure)
No related works found for this paper.