articleMaterials Science and Engineering R ReportsDec 10, 2014GREEN OA

High-K materials and metal gates for CMOS applications

JRJohn RobertsonRMRobert M. Wallace

University of Cambridge · The University of Texas at Dallas

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754
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2

Topics & keywords

Topics
Keywords
  • Materials science
  • Metal gate
  • Gate oxide
  • Gate dielectric
  • Optoelectronics
  • High-κ dielectric
  • Equivalent oxide thickness
  • Time-dependent gate oxide breakdown
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