Atomic layer deposition of transition metals
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Abstract
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Citation impact
656
total citations
- FWCI
- 16.29
- Percentile
- 100%
- References
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Authors
3Topics & keywords
Topics
Keywords
- Atomic layer deposition
- Conformal coating
- Homoleptic
- Transition metal
- Materials science
- Cobalt
- Hydrogen
- Nickel
UN Sustainable Development Goals
- Clean water and sanitation
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