articleNature MaterialsOct 26, 2003Closed access

Atomic layer deposition of transition metals

Harvard University

PubMed
Indexed incrossrefpubmed

Abstract

No abstract available for this paper.

Citation impact

656
total citations
FWCI
16.29
Percentile
100%
References
20
Citations per year

Authors

3

Topics & keywords

Keywords
  • Atomic layer deposition
  • Conformal coating
  • Homoleptic
  • Transition metal
  • Materials science
  • Cobalt
  • Hydrogen
  • Nickel
UN Sustainable Development Goals
  • Clean water and sanitation
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