articleJapanese Journal of Applied PhysicsMay 1, 2006Closed access

Amorphous Oxide Semiconductors for High-Performance Flexible Thin-Film Transistors

Tokyo Institute of Technology

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Abstract

Recently, we have demonstrated the potential of amorphous oxide semiconductors (AOSs) for developing flexible thin-film transistors (TFTs). A material exploration of AOSs desired as the channel layer in TFTs is most important for developing high-performance devices. Here, we report our concept of material exploration for AOSs in high-performance flexible and transparent TFTs from the viewpoints of chemical bonding and electronic structure in oxide semiconductors. We find that amorphous In–Ga–Zn–O (a-IGZO) exhibits good carrier transport properties such as reasonably high Hall mobilities (>10 cm2·V-1·s-1) and a good controllability of carrier concentration from

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Authors

6

Topics & keywords

Keywords
  • Thin-film transistor
  • Materials science
  • Amorphous solid
  • Optoelectronics
  • Semiconductor
  • Electron mobility
  • Oxide
  • Layer (electronics)
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