Amorphous Oxide Semiconductors for High-Performance Flexible Thin-Film Transistors
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Abstract
Recently, we have demonstrated the potential of amorphous oxide semiconductors (AOSs) for developing flexible thin-film transistors (TFTs). A material exploration of AOSs desired as the channel layer in TFTs is most important for developing high-performance devices. Here, we report our concept of material exploration for AOSs in high-performance flexible and transparent TFTs from the viewpoints of chemical bonding and electronic structure in oxide semiconductors. We find that amorphous In–Ga–Zn–O (a-IGZO) exhibits good carrier transport properties such as reasonably high Hall mobilities (>10 cm2·V-1·s-1) and a good controllability of carrier concentration from
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Topics
Keywords
- Thin-film transistor
- Materials science
- Amorphous solid
- Optoelectronics
- Semiconductor
- Electron mobility
- Oxide
- Layer (electronics)
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