Synthesis of Large‐Area MoS 2 Atomic Layers with Chemical Vapor Deposition
Institute of Atomic and Molecular Sciences, Academia Sinica · Tunghai University · +1 more institution
Indexed inarxivcrossrefpubmed
Abstract
Large-area MoS(2) atomic layers are synthesized on SiO(2) substrates by chemical vapor deposition using MoO(3) and S powders as the reactants. Optical, microscopic and electrical measurements suggest that the synthetic process leads to the growth of MoS(2) monolayer. The TEM images verify that the synthesized MoS(2) sheets are highly crystalline.
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Authors
11- YLYi‐Hsien Lee
Institute of Atomic and Molecular Sciences, Academia Sinica
- XZXinquan Zhang
Tunghai University
- WZWenjing Zhang
Institute of Atomic and Molecular Sciences, Academia Sinica
- MCMu‐Tung Chang
Institute of Physics, Academia Sinica
- CLCheng‐Te Lin
Institute of Atomic and Molecular Sciences, Academia Sinica
Topics & keywords
Topics
Keywords
- Chemical vapor deposition
- Materials science
- Monolayer
- Atomic layer deposition
- Deposition (geology)
- Chemical engineering
- Nanotechnology
- Combustion chemical vapor deposition
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