Advances in top–down and bottom–up surface nanofabrication: Techniques, applications & future prospects
University of Notre Dame · Center for Biomolecular Nanotechnologies · +3 more institutions
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Abstract
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868
total citations
- FWCI
- 13.58
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- 100%
- References
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Authors
6Topics & keywords
Topics
Keywords
- Nanolithography
- Nanotechnology
- Fabrication
- Lithography
- Atomic layer deposition
- Materials science
- Nanoelectronics
- Nanoimprint lithography
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