articleJournal of Heat TransferSep 23, 2003Closed access

Measuring Thermal and Thermoelectric Properties of One-Dimensional Nanostructures Using a Microfabricated Device

The University of Texas at Austin · University of California, Berkeley · +2 more institutions

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Abstract

We have batch-fabricated a microdevice consisting of two adjacent symmetric silicon nitride membranes suspended by long silicon nitride beams for measuring thermophysical properties of one-dimensional nanostructures (nanotubes, nanowires, and nanobelts) bridging the two membranes. A platinum resistance heater/thermometer is fabricated on each membrane. One membrane can be Joule heated to cause heat conduction through the sample to the other membrane. Thermal conductance, electrical conductance, and Seebeck coefficient can be measured using this microdevice in the temperature range of 4–400 K of an evacuated Helium cryostat. Measurement sensitivity, errors, and uncertainty are discussed. Measurement results of…

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Topics & keywords

Keywords
  • Materials science
  • Silicon nitride
  • Carbon nanotube
  • Thermoelectric effect
  • Thermal conductivity
  • Nanowire
  • Optoelectronics
  • Thermometer
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