Soft X-ray microscopy at a spatial resolution better than 15 nm
Lawrence Berkeley National Laboratory · University of California, Berkeley
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Abstract
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844
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Authors
5- WCWeilun ChaoCorresponding
Lawrence Berkeley National Laboratory, University of California, Berkeley
- BHB. Harteneck
Lawrence Berkeley National Laboratory
- JAJ. Alexander Liddle
Lawrence Berkeley National Laboratory
- EHErik H. Anderson
Lawrence Berkeley National Laboratory
- DADavid Attwood
Lawrence Berkeley National Laboratory, University of California, Berkeley
Topics & keywords
Topics
Keywords
- Water window
- Materials science
- Microscopy
- Nanometre
- Microscope
- Silicon
- Penetration depth
- Image resolution
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