article·Nature·Jun 1, 2005Closed access

Soft X-ray microscopy at a spatial resolution better than 15 nm

WCWeilun ChaoCorresponding authorBHB. HarteneckJAJ. Alexander LiddleEHErik H. AndersonDADavid Attwood

Lawrence Berkeley National Laboratory · University of California, Berkeley

PubMed
Indexed incrossrefpubmed

Abstract

No abstract available for this paper.

Citation impact

844
total citations
FWCI
79.60
Percentile
100%
References
33
Citations per year

Authors

5
  • WC
    Weilun ChaoCorresponding

    Lawrence Berkeley National Laboratory, University of California, Berkeley

  • BH
    B. Harteneck

    Lawrence Berkeley National Laboratory

  • JA
    J. Alexander Liddle

    Lawrence Berkeley National Laboratory

  • EH
    Erik H. Anderson

    Lawrence Berkeley National Laboratory

  • DA
    David Attwood

    Lawrence Berkeley National Laboratory, University of California, Berkeley

Topics & keywords

Topics
  • Primary topicAdvanced X-ray Imaging Techniques100%
  • X-ray Spectroscopy and Fluorescence Analysis100%
  • Advanced Electron Microscopy Techniques and Applications100%
Keywords
  • Water window
  • Materials science
  • Microscopy
  • Nanometre
  • Microscope
  • Silicon
  • Penetration depth
  • Image resolution
No related works found for this paper.

Funding

  • NS
    National Science Foundation
  • UD
    U.S. Department of Energy
  • OO
    Office of Science
  • BE
    Basic Energy Sciences