Lithium niobate on insulator (LNOI) for micro‐photonic devices
ETH Zurich · Onefive (Switzerland) · +3 more institutions
Abstract
Abstract The state‐of‐the‐art of high‐refractive‐index‐contrast single‐crystalline thin lithium niobate (LiNbO 3 ) films as a new platform for high‐density integrated optics is reviewed. Sub‐micrometer thin LiNbO 3 films are obtained by “ion‐slicing”. They can be bonded by two different techniques to a low‐index substrate to obtain “lithium niobate on insulator” (LNOI) even as wafer of 3” diameter. Different micro‐ and nano‐structuring techniques have been used to successfully develop micro‐photonic devices. To be specific, the fabrication and characterization of LNOI photonic wires with cross‐section < 1 µm 2 , periodically poled LNOI photonic wires for second harmonic generation, electro‐optically tunable…
Citation impact
- FWCI
- 8.24
- Percentile
- 100%
- References
- 39
Authors
4Topics & keywords
- Lithium niobate
- Materials science
- Optoelectronics
- Photonics
- Refractive index contrast
- Fabrication
- Thin film
- Wafer
- Affordable and clean energy