articleApplied Physics LettersSep 22, 2008Closed access

Origin of threshold voltage instability in indium-gallium-zinc oxide thin film transistors

Samsung (South Korea)

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Abstract

We investigated the impact of the passivation layer on the stability of indium-gallium-zinc oxide (IGZO) thin film transistors. While the device without any passivation layer showed a huge threshold voltage (Vth) shift under positive gate voltage stress, the suitably passivated device did not exhibit any Vth shift. The charge trapping model, which has been believed to be a plausible mechanism, cannot by itself explain this behavior. Instead, the Vth instability was attributed to the interaction between the exposed IGZO backsurface and oxygen and/or water in the ambient atmosphere during the gate voltage stress.

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Authors

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Topics & keywords

Keywords
  • Passivation
  • Threshold voltage
  • Materials science
  • Indium
  • Gallium
  • Thin-film transistor
  • Optoelectronics
  • Stress (linguistics)
UN Sustainable Development Goals
  • Clean water and sanitation
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