Development of hafnium based high-k materials—A review
University of California, Los Angeles
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Abstract
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Citation impact
580
total citations
- FWCI
- 28.10
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- 100%
- References
- 290
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Authors
3Topics & keywords
Topics
Keywords
- Hafnium
- Materials science
- Dielectric
- High-κ dielectric
- Gate dielectric
- Microelectronics
- Optoelectronics
- Engineering physics
UN Sustainable Development Goals
- Industry, innovation and infrastructure
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