articleMaterials Science and Engineering R ReportsJan 16, 2011Closed access

Development of hafnium based high-k materials—A review

University of California, Los Angeles

Indexed incrossref

Abstract

No abstract available for this paper.

Citation impact

580
total citations
FWCI
28.10
Percentile
100%
References
290
Citations per year

Authors

3

Topics & keywords

Keywords
  • Hafnium
  • Materials science
  • Dielectric
  • High-κ dielectric
  • Gate dielectric
  • Microelectronics
  • Optoelectronics
  • Engineering physics
UN Sustainable Development Goals
  • Industry, innovation and infrastructure
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