Femtosecond laser ablation of silicon–modification thresholds and morphology
Federal Institute For Materials Research and Testing
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Abstract
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Citation impact
807
total citations
- FWCI
- 27.89
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- 100%
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Authors
5- JBJörn BonseCorresponding
Federal Institute For Materials Research and Testing
- SBS. Baudach
Federal Institute For Materials Research and Testing
- JKJörg Krüger
Federal Institute For Materials Research and Testing
- WKWolfgang Kautek
Federal Institute For Materials Research and Testing
- MLM. Lenzner
Federal Institute For Materials Research and Testing
Topics & keywords
Topics
Keywords
- Fluence
- Ablation
- Materials science
- Pulse duration
- Silicon
- Irradiation
- Femtosecond
- Sapphire
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