High power pulsed magnetron sputtering: A review on scientific and engineering state of the art
RWTH Aachen University · Sulzer (Germany) · +1 more institution
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Abstract
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Citation impact
1,043
total citations
- FWCI
- 70.91
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- 100%
- References
- 157
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3Topics & keywords
Topics
Keywords
- High-power impulse magnetron sputtering
- Materials science
- Sputter deposition
- Physical vapor deposition
- Optoelectronics
- Duty cycle
- Cavity magnetron
- Plasma
UN Sustainable Development Goals
- Industry, innovation and infrastructure
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