Capacitive energy storage in micro-scale devices: recent advances in design and fabrication of micro-supercapacitors

Miniaturized energy storage is essential for the continuous development and further miniaturization of electronic devices. Electrochemical capacitors (ECs), also called supercapacitors, are energy storage devices with a high power density, fast charge and discharge rates, and long service life. Small-scale supercapacitors, or micro-supercapacitors, can be integrated with microelectronic devices to work as stand-alone power sources or as efficient energy storage units complementing batteries and energy harvesters, leading to wider use of these devices in many industries. In recent years, the research in this field has rapidly advanced and micro-supercapacitors with improved storage capacity and power density…