articleThin Solid FilmsOct 30, 2009Closed access

A structure zone diagram including plasma-based deposition and ion etching

AAAndré Anders

Lawrence Berkeley National Laboratory

Indexed incrossref

Abstract

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897
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FWCI
27.84
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100%
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36
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1

Topics & keywords

Topics
Keywords
  • Etching (microfabrication)
  • Diagram
  • Ion
  • Deposition (geology)
  • Sputter deposition
  • Kinetic energy
  • High-power impulse magnetron sputtering
  • Plasma
UN Sustainable Development Goals
  • Affordable and clean energy
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