articleActa MaterialiaJan 1, 2002Closed access

Effects of the substrate on the determination of thin film mechanical properties by nanoindentation

Stanford University

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Abstract

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1,543
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FWCI
74.92
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100%
References
36
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Authors

2

Topics & keywords

Keywords
  • Nanoindentation
  • Materials science
  • Composite material
  • Sapphire
  • Indentation
  • Thin film
  • Elastic modulus
  • Stiffness
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