articleNature NanotechnologyAug 1, 2014GREEN OA

Advanced scanning probe lithography

RGRicardo Garcı́aAWArmin W. KnollERElisa Riedo

Instituto de Ciencia de Materiales de Madrid · IBM (United States) · +1 more institution

PubMed
Indexed inarxivcrossrefpubmed

Abstract

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Citation impact

651
total citations
FWCI
38.14
Percentile
100%
References
130
Citations per year

Authors

3

Topics & keywords

Topics
Keywords
  • Lithography
  • Nanotechnology
  • Materials science
  • Scanning probe microscopy
  • Optoelectronics
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