Large-Scale Hexagonal-Patterned Growth of Aligned ZnO Nanorods for Nano-optoelectronics and Nanosensor Arrays

An effective approach is demonstrated for growing large-area, hexagonally patterned, aligned ZnO nanorods. The synthesis uses a catalyst template produced by a self-assembled monolayer of submicron spheres and guided vapor-liquid-solid (VLS) growth on a single crystal alumina substrate. The ZnO nanorods have uniform shape and length, align vertically on the substrate, and are distributed according to the pattern defined by the catalyst template. The nanorods grow along [0001] with side surfaces defined by {21̄1̄0}. This approach opens the possibility of creating patterned one-dimensional nanostructures for applications as sensor arrays, piezoelectric antenna arrays, optoelectronic devices, and interconnects.