articleNature PhotonicsMay 18, 2012Closed access

Chemically etched ultrahigh-Q wedge-resonator on a silicon chip

HLHansuek LeeTCTong ChenJLJiang LiKYKi Youl YangSJSeokmin Jeon

California Institute of Technology

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Abstract

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695
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Authors

7

Topics & keywords

Topics
Keywords
  • Resonator
  • Optoelectronics
  • Fabrication
  • Chip
  • Materials science
  • Q factor
  • Silicon
  • Optics
UN Sustainable Development Goals
  • Affordable and clean energy
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