articleLaser & Photonics ReviewAug 8, 2012Closed access

Direct femtosecond laser surface nano/microstructuring and its applications

AYA. Y. VorobyevCGChunlei Guo

University of Rochester

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Abstract

Abstract This paper reviews a new field of direct femtosecond laser surface nano/microstructuring and its applications. Over the past few years, direct femtosecond laser surface processing has distinguished itself from other conventional laser ablation methods and become one of the best ways to create surface structures at nano‐ and micro‐scales on metals and semiconductors due to its flexibility, simplicity, and controllability in creating various types of nano/microstructures that are suitable for a wide range of applications. Significant advancements were made recently in applying this technique to altering optical properties of metals and semiconductors. As a result, highly absorptive metals and…

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Authors

2

Topics & keywords

Topics
Keywords
  • Femtosecond
  • Materials science
  • Laser
  • Black silicon
  • Nanotechnology
  • Semiconductor
  • Nano-
  • Silicon
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