reviewSensors and Actuators A PhysicalApr 9, 2004Closed access

TiNi-based thin films in MEMS applications: a review

YFYongqing FuHDHejun DuWHWeimin HuangSZSam ZhangMHMin Hu

Nanyang Technological University

Indexed incrossref

Abstract

No abstract available for this paper.

Citation impact

781
total citations
FWCI
17.72
Percentile
100%
References
96
Citations per year

Authors

5

Topics & keywords

Topics
Keywords
  • Materials science
  • Actuator
  • Microelectromechanical systems
  • Thin film
  • Shape-memory alloy
  • Characterization (materials science)
  • Residual stress
  • Nanotechnology
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