articleMRS BulletinMay 1, 2007BRONZE OA

Focused Ion Beam Microscopy and Micromachining

CACynthia A. VolkertAMAlexander Minor
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Abstract

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638
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2

Topics & keywords

Topics
Keywords
  • Focused ion beam
  • Surface micromachining
  • Nanotechnology
  • Materials science
  • Micrometer
  • Nanometre
  • Characterization (materials science)
  • Ion beam
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