articleAnnual Review of Materials ResearchJun 22, 2012Closed access

Solid-State Dewetting of Thin Films

Massachusetts Institute of Technology

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Abstract

Solid films are usually metastable or unstable in the as-deposited state, and they will dewet or agglomerate to form islands when heated to sufficiently high temperatures. This process is driven by surface energy minimization and can occur via surface diffusion well below a film's melting temperature, especially when the film is very thin. Dewetting during processing of films for use in micro- and nanosystems is often undesirable, and means of avoiding dewetting are important in this context. However, dewetting can also be useful in making arrays of nanoscale particles for electronic and photonic devices and for catalyzing growth of nanotubes and nanowires. Templating of dewetting using patterned surface…

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Authors

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Topics & keywords

Keywords
  • Dewetting
  • Materials science
  • Metastability
  • Nanotechnology
  • Surface energy
  • Nanoscopic scale
  • Thin film
  • Agglomerate
UN Sustainable Development Goals
  • Affordable and clean energy
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