articleThin Solid FilmsJul 25, 2008Closed access

Celebrating the 100th anniversary of the Stoney equation for film stress: Developments from polycrystalline steel strips to single crystal silicon wafers

GCG. C. A. M. Janssen MAMostafa AbdallaFVF. van KeulenBRB. R. Pujada BVBart van Venrooy

Delft University of Technology · Materials innovation institute · +1 more institution

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Abstract

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Citation impact

692

total citations

FWCI: 12.50
Percentile: 100%
References: 33

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Authors

5

GC
G. C. A. M. JanssenCorresponding
Delft University of Technology
MA
Mostafa Abdalla
Delft University of Technology
FV
F. van Keulen
Delft University of Technology
BR
B. R. Pujada
Materials innovation institute, Delft University of Technology
BV
Bart van Venrooy
Netherlands Organisation for Applied Scientific Research

Topics & keywords

Topics

Keywords

Materials science
Wafer
Substrate (aquarium)
Silicon
Isotropy
Curvature
Composite material
Stress (linguistics)

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