Deterministic transfer of two-dimensional materials by all-dry viscoelastic stamping

The deterministic transfer of two-dimensional crystals constitutes a crucial step towards the fabrication of heterostructures based on the artificial stacking of two-dimensional materials. Moreover, controlling the positioning of two-dimensional crystals facilitates their integration in complex devices, which enables the exploration of novel applications and the discovery of new phenomena in these materials. To date, deterministic transfer methods rely on the use of sacrificial polymer layers and wet chemistry to some extent. Here, we develop an all-dry transfer method that relies on viscoelastic stamps and does not employ any wet chemistry step. This is found to be very advantageous to freely suspend these…