Atomic Layer Deposition: An Overview

ADVERTISEMENT RETURN TO ISSUEPREVReviewNEXTAtomic Layer Deposition: An OverviewSteven M. George*View Author Information Department of Chemistry and Biochemistry and Department of Chemical and Biological Engineering, University of Colorado, Boulder, Colorado 80309* E-mail address: [email protected].Cite this: Chem. Rev. 2010, 110, 1, 111–131Publication Date (Web):November 30, 2009Publication History Received12 February 2009Published online30 November 2009Published inissue 13 January 2010https://pubs.acs.org/doi/10.1021/cr900056bhttps://doi.org/10.1021/cr900056breview-articleACS PublicationsCopyright © 2009 American Chemical SocietyRequest reuse permissionsArticle Views67656Altmetric-Citations4604LEARN ABOUT…