articleMRS BulletinMay 1, 2007GREEN OA

TEM Sample Preparation and FIB-Induced Damage

JMJoachim MayerLALucille A. GiannuzziTKTakeo KaminoJRJoseph R. Michael
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870
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22.37
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4

Topics & keywords

Topics
Keywords
  • Materials science
  • Focused ion beam
  • Sample preparation
  • Transmission electron microscopy
  • Nanotechnology
  • Fabrication
  • Resolution (logic)
  • Ion
UN Sustainable Development Goals
  • Affordable and clean energy
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