Chemical vapour deposition of zeolitic imidazolate framework thin films
IMEC · KU Leuven · +2 more institutions
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Abstract
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Citation impact
669
total citations
- FWCI
- 16.19
- Percentile
- 100%
- References
- 63
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10Topics & keywords
Topics
Keywords
- Materials science
- Chemical vapor deposition
- Nanotechnology
- Microporous material
- Microelectronics
- Metal-organic framework
- Nanolithography
- Chemical engineering
UN Sustainable Development Goals
- Industry, innovation and infrastructure
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