articleScienceFeb 12, 2016GREEN OA

On-chip and freestanding elastic carbon films for micro-supercapacitors

PHPeihua HuangCLChristophe LethienSPS. PinaudKBKévin BrousseRLR. Laloo

Centre National de la Recherche Scientifique · Université Toulouse III - Paul Sabatier · +8 more institutions

PubMed
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Abstract

Integration of electrochemical capacitors with silicon-based electronics is a major challenge, limiting energy storage on a chip. We describe a wafer-scale process for manufacturing strongly adhering carbide-derived carbon films and interdigitated micro-supercapacitors with embedded titanium carbide current collectors, fully compatible with current microfabrication and silicon-based device technology. Capacitance of those films reaches 410 farads per cubic centimeter/200 millifarads per square centimeter in aqueous electrolyte and 170 farads per cubic centimeter/85 millifarads per square centimeter in organic electrolyte. We also demonstrate preparation of self-supported, mechanically stable, micrometer-thick…

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701
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Authors

13

Topics & keywords

Topics
Keywords
  • Supercapacitor
  • Microfabrication
  • Materials science
  • Electronics
  • Layer (electronics)
  • Carbon fibers
  • Nanotechnology
  • Capacitor
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