Electrochemical Delamination of CVD-Grown Graphene Film: Toward the Recyclable Use of Copper Catalyst
National University of Singapore
Indexed incrossrefpubmed
Abstract
The separation of chemical vapor deposited (CVD) graphene from the metallic catalyst it is grown on, followed by a subsequent transfer to a dielectric substrate, is currently the adopted method for device fabrication. Most transfer techniques use a chemical etching method to dissolve the metal catalysts, thus imposing high material cost in large-scale fabrication. Here, we demonstrate a highly efficient, nondestructive electrochemical route for the delamination of CVD graphene film from metal surfaces. The electrochemically delaminated graphene films are continuous over 95% of the surface and exhibit increasingly better electronic quality after several growth cycles on the reused copper catalyst, due to the…
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Authors
7Topics & keywords
Topics
Keywords
- Materials science
- Graphene
- Fabrication
- Catalysis
- Copper
- Chemical vapor deposition
- Etching (microfabrication)
- Isotropic etching
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