Ferroelectricity in Simple Binary ZrO 2 and HfO 2
Fraunhofer Institute for Photonic Microsystems · NaMLab (Germany) · +3 more institutions
Abstract
The transition metal oxides ZrO(2) and HfO(2) as well as their solid solution are widely researched and, like most binary oxides, are expected to exhibit centrosymmetric crystal structure and therewith linear dielectric characteristics. For this reason, those oxides, even though successfully introduced into microelectronics, were never considered to be more than simple dielectrics possessing limited functionality. Here we report the discovery of a field-driven ferroelectric phase transition in pure, sub 10 nm ZrO(2) thin films and a composition- and temperature-dependent transition to a stable ferroelectric phase in the HfO(2)-ZrO(2) mixed oxide. These unusual findings are attributed to a size-driven…
Citation impact
- FWCI
- 16.73
- Percentile
- 100%
- References
- 48
Authors
8Topics & keywords
- Ferroelectricity
- Orthorhombic crystal system
- Tetragonal crystal system
- Monoclinic crystal system
- Materials science
- Phase transition
- Dielectric
- Microelectronics