reviewMicroelectronic EngineeringMar 1, 2015Closed access

Nanofabrication by electron beam lithography and its applications: A review

YCYifang Chen

State Key Laboratory of ASIC and System · Fudan University

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Abstract

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Citation impact

829
total citations
FWCI
22.29
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100%
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112
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1

Topics & keywords

Topics
Keywords
  • Nanolithography
  • Resist
  • Electron-beam lithography
  • Nanotechnology
  • Lithography
  • Materials science
  • Reactive-ion etching
  • Metamaterial
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