Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications

Fu, Yongqing; Luo, Jikui; Nguyen, Nam‐Trung; Walton, A. J.; Flewitt, Andrew J.; Zu, X.T.; Li, Yifan; McHale, Glen; Matthews, A.; Iborra, E.; Du, Hejun; Milne, W. I.

doi:10.1016/j.pmatsci.2017.04.006

articleProgress in Materials ScienceApr 24, 2017HYBRID OA

Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications

YFYongqing Fu JLJikui Luo NNNam‐Trung Nguyen AJA. J. Walton AJAndrew J. Flewitt

Northumbria University · University of Electronic Science and Technology of China · +8 more institutions

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Abstract

Recently, piezoelectric thin films including zinc oxide (ZnO) and aluminium nitride (AlN) have found a broad range of lab-on-chip applications such as biosensing, particle/cell concentrating, sorting/patterning, pumping, mixing, nebulisation and jetting. Integrated acoustic wave sensing/microfluidic devices have been fabricated by depositing these piezoelectric films onto a number of substrates such as silicon, ceramics, diamond, quartz, glass, and more recently also polymer, metallic foils and bendable glass/silicon for making flexible devices. Such thin film acoustic wave devices have great potential for implementing integrated, disposable, or bendable/flexible lab-on-a-chip devices into various sensing and…

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Topics & keywords

Topics

Keywords

Materials science
Piezoelectricity
Thin film
Substrate (aquarium)
Nanotechnology
Microelectromechanical systems
Optoelectronics
Microfluidics

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