articleJournal of Applied PhysicsMar 18, 2019GREEN OA

AlScN: A III-V semiconductor based ferroelectric

Hochschule für Angewandte Wissenschaften Kiel · Fraunhofer Institute for Silicon Technology

Indexed inarxivcrossref

Abstract

Ferroelectric switching is unambiguously demonstrated for the first time in a III-V semiconductor based material: Al1-xScxN—A discovery which could help to satisfy the urgent demand for thin film ferroelectrics with high performance and good technological compatibility with generic semiconductor technology which arises from a multitude of memory, micro/nano-actuator, and emerging applications based on controlling electrical polarization. The appearance of ferroelectricity in Al1-xScxN can be related to the continuous distortion of the original wurtzite-type crystal structure towards a layered-hexagonal structure with increasing Sc content and tensile strain, which is expected to be extendable to other…

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