Advanced Micro- and Nano-Gas Sensor Technology: A Review
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Abstract
Micro- and nano-sensors lie at the heart of critical innovation in fields ranging from medical to environmental sciences. In recent years, there has been a significant improvement in sensor design along with the advances in micro- and nano-fabrication technology and the use of newly designed materials, leading to the development of high-performance gas sensors. Advanced micro- and nano-fabrication technology enables miniaturization of these sensors into micro-sized gas sensor arrays while maintaining the sensing performance. These capabilities facilitate the development of miniaturized integrated gas sensor arrays that enhance both sensor sensitivity and selectivity towards various analytes. In the past,…
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4Topics & keywords
Topics
Keywords
- Miniaturization
- Fabrication
- Nano-
- Nanotechnology
- Machining
- Computer science
- Materials science
- Engineering
UN Sustainable Development Goals
- Industry, innovation and infrastructure
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