Flexible Capacitive Pressure Sensor Enhanced by Tilted Micropillar Arrays

Sensitivity of the sensor is of great importance in practical applications of wearable electronics or smart robotics. In the present study, a capacitive sensor enhanced by a tilted micropillar array-structured dielectric layer is developed. Because the tilted micropillars undergo bending deformation rather than compression deformation, the distance between the electrodes is easier to change, even discarding the contribution of the air gap at the interface of the structured dielectric layer and the electrode, thus resulting in high pressure sensitivity (0.42 kPa–1) and very small detection limit (1 Pa). In addition, eliminating the presence of uncertain air gap, the dielectric layer is strongly bonded with the…

• NN
  National Natural Science Foundation of China

  Awards: 51522508, 91323303
• NS
  Natural Science Foundation of Shaanxi Province

  Award: 2016JM5086